The authors have requested the following correction to Eq. (18) of the original paper.1 

Following the definition of Hm from Ref. 100, in which Hm = −εmo, where εmo itself is a negative value, Eq. (18) should read as follows:
D1=D0exp(Hm/kT).
(18)
1.
N. E.
Richey
,
C.
de Paula
, and
S. F.
Bent
, “
Understanding chemical and physical mechanisms in atomic layer deposition
,”
J. Chem. Phys.
152
,
040902
(
2020
).